11 nanometer

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11	Microsoft PowerPoint - BEUV Dublin1.3ho .ppt Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2010-12-02 11:22:35 22 nanometer 16 nanometer Ultraviolet Extreme ultraviolet 32 nanometer Multiple patterning 11 nanometer Angular resolution Next-generation lithography Electromagnetic radiation Extreme ultraviolet lithography Photolithography
12	INTERNATIONAL TECHNOLOGY ROADMAP FOR Add to Reading List Source URL: www.itrs.net Language: English - Date: 2012-01-10 11:47:02 Semiconductor device fabrication Extreme ultraviolet lithography Multiple patterning Computational lithography Photolithography Photomask Optical proximity correction Overlay Control 11 nanometer Microtechnology Materials science Technology
13	PDF Document Add to Reading List Source URL: www.itrs.net Language: English - Date: 2006-12-05 03:54:52 Integrated circuits Digital electronics Electronic design Logic families MOSFET Semiconductors Multigate device 11 nanometer CMOS Electronic engineering Electrical engineering Electronics